25,000 Sq Ft Fully Functioning Flat Panel TFT-LCD Display Manufacturing Line Generation 2 Form Factor (Ideal For Glass Or Plastic Substrates, Prototyping/R&D/Pilot Or Low Volume Production).
Key Assets
ULVAC Sputter Cluster Tool For Metal & TCO Deposition • Applied Materials AKT 1600 PEVCD Cluster Tool For Intrinsic Silicon & Doped Silicon Deposition • TEL DRY ETCH Cluster Tool For Active And Passivation Etch • (4) Fully Automated Wet Clean, Wet Etch & Wet Strip Stations • Nikon Lithography & Coating/Developing System • Gas Cabinets, Pumps & Other Ancillary Equipment